Ohring, Milton. Materials science of thin films : deposition and structure / Milton Ohring. - 2nd ed. - New Delhi : Academic Press | Elsevier, c 2002. - xxi, 794 p. : ill. ; 24 cm. ISBN: 9788131202791 Subjects--Topical Terms: Thin films. Dewey Class. No.: 620.11 / OHR