000			00505nam a22001697a 4500
999			_c3164 _d3164
008			191024b2002 ||||| |||| 00| 0 eng d
020			_a9788131202791
040			_aIMU CC
082	0	0	_223 _a620.11 _bOHR
100	1		_aOhring, Milton.
245	1	0	_aMaterials science of thin films : _bdeposition and structure / _cMilton Ohring.
250			_a2nd ed.
260			_aNew Delhi : _bAcademic Press | Elsevier, _cc 2002.
300			_axxi, 794 p. : _bill. ; _c24 cm.
650		0	_aThin films.
942			_cBK